New IJD deposition systems – the Lab Jet range

We present our new 2023 Lab Jet deposition-chamber range, from R&D to small production.

Lab Jet 4.0 is the smallest — fits one IJD source and one additional source (sputtering, evaporation, etc.); a fully featured system for R&D and process development, with options such as a heated rotary sample holder, multi-target holder and load lock.

Lab Jet 6.0 is designed for multi-material processes, working with up to 3 IJD sources in co-deposition. Lab Jet 8.0 is the largest chamber, designed for a carousel, a 5× IJD source unit and additional conventional sources — the perfect pilot system to test scale-up processes.